The Thermo Scientific™ μHeater holder is a high vacuum compatible ultra-fast heating stage for in situ sample heating up to 1200 °C. It takes advantage of the dual nature of our DualBeam™ instruments by allowing for sample preparation by FIB and transfer to a MEMS device without breaking vacuum in the vacuum chamber. First, the area of interest is selected; then, a chunk of material is cut with the FIB and attached to the micromanipulator needle using beam-induced deposition. After lift-out, it can then be shaped using the FIB. The chunk is then placed on the MEMS heating holder, fixed with beam-induced deposition, and cut loose from the needle. In a similar way, a TEM lamella can be placed on the heating holder. Various sized powders and nanoparticles can also be directly deposited on a MEMS chip, allowing using the heating stage in SEM.