Helios G4 HX DualBeam for Semiconductors
Designed to meet the challenges of advanced semiconductor failure analysis labs
The Thermo Scientific™ Helios G4 HX DualBeam™ microscope replaces the highly successful Helios 460HP as the industry’s highest throughput, dedicated transmission electron microscope (TEM) lamella preparation platform. The Helios G4 HX DualBeam utilizes a patented inverted TEM sample preparation method to create high-quality lamellas for the most advanced semiconductor nodes. Integrating our EasyLift EX Nanomanipulator, new Automated QuickFlip shuttle, and iFast automation software platform, the Helios G4 HX DualBeam provides unmatched value to Failure Analysis labs by means of a fully integrated, automated solution. Improved materials contrast enabled by low-loss in-lens detectors, along with extreme high-resolution SEM imaging at low-kV, ensures accurate endpointing, which results in increased yield during final thinning of the TEM sample.
The world’s most advanced DualBeam platform for imaging, analysis, and TEM sample preparation for semiconductor failure analysis, process development, and process control laboratories.
The Helios G4 HX DualBeam combines the industry-leading, highest-resolution, highest-contrast Elstar+UC SEM with the most advanced Phoenix FIB for best-in-class imaging and milling performance. Specifically designed for high-throughput, high-quality, ultra-thin TEM lamella preparation, the Helios G4 HX DualBeam comes with the Thermo Scientific™ EasyLift EX Nanomanipulator and new Automated QuickFlip shuttle for precise, accurate, and repeatable in situ sample lift-out and manipulations. When used in conjunction with our iFast Starter Recipes for automated TEM sample preparation, even novice operators are able to repeatedly create high-quality, ultra-thin lamellas with confidence.
The Helios G4 HX DualBeam is designed to meet the challenges of advanced semiconductor failure analysis labs. The Cell Navigator accurately locates the defect in repeating structures using automated sample navigation. This improves the success rate of finding the intended region of interest by greater than 5%. In addition, the patented inverted TEM sample preparation method, enabled by the EasyLift EX Nanomanipulator, new Automated QuickFlip shuttle, and automation software platform iFAST, delivers the highest throughput in the industry.