Q300T T Plus – triple target sputter coater for specimens up to 200mm diameter
The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8″/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating see the Q300T D Plus.
- Ultimate vacuum of 5 x 10-5mbar or less possible
- New touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-use profiles can be set up on one machine
- New software sorts recipes per user according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Interchangeable stage options
- Three sputter heads for larger area deposition of different materials